제품소개

PRODUCT

대기 LTR

Atmosheric LCD Transfer Robot is able to turn large size glass over vertically and trun over at low pass line. We have plenty of experience from the Array process field to the cell process field.



  • Glass Size

    3G~4G
  • Cleanliness

    Class 10(0.3㎛/cf)
  • Payload

    4~10kg(Including the hand)
Model Arm Type Moving Axes Glass(Wafer) Size Z-Axis Stroke Payload Download
DWG STP JPG PDF
AR-3GS Single Arm 3 400*500mm 400~600mm 5kg (Including hand)

D

AR-4GS Single Arm 3 730*920mm 800~1000mm 10kg (Including hand)

D

AR-3GW Dual Arm 4 400*500mm 400~600mm 5kg (Including hand)

D

AR-4GW Dual Arm 4 730*920mm 800~1000mm 10kg (Including hand)

D

AR-3GSR Single Arm 3+1 400*500mm 400~600mm 4kg (Including hand)

D

AR-4GSR Single Arm 3+1 730*920mm 800~1000mm 10Kg (Including hand)

D